Semiconductor device

ABSTRACT

A semiconductor device having a bipolar transistor improved with heat dissipation. A semiconductor device having bipolar transistors formed in a plurality of device forming regions electrically isolated from each other by device isolation trenches traversing the semiconductor layer, in which a device isolation trench for each of unit bipolar transistors connected in parallel is removed and the plurality of unit bipolar transistors connected in series are entirely surrounded with one device isolation trench.

CLAIM FOR PRIORITY

The present application is a continuation of U.S. application Ser. No. 11/334,498, filed Jan. 19, 2006 now U.S. Pat. No. 7,569,895, and which application claims priority from Japanese application JP 2005-028374 filed on Feb. 4, 2005, the contents of which are hereby incorporated by reference into this application.

FIELD OF THE INVENTION

The present invention concerns an improvement for the heat dissipation of a bipolar transistor and, more in particular, it relates to an improvement for the heat dissipation of a semiconductor device which is an effective when applied to an insulated device isolation type bipolar transistor.

BACKGROUND OF THE INVENTION

JP-A No. 2002-299466 is a document that discloses an insulated device isolation type bipolar transistor technique on an SOI (Silicon On Insulator) substrate. Particularly, FIG. 2 shows an example of planar and cross sectional structures of a unit bipolar transistor. Further, FIG. 4 shows an example of the arrangement for interconnections when multiple unit bipolar transistors are connected in parallel. Further, FIG. 21 shows an example of a cross sectional structure of a multi-emitter type unit bipolar transistor.

SUMMARY OF THE INVENTION

The present inventors have found that the prior art described above involves the following problems.

The structure of a unit bipolar transistor in the prior art is designed, for improving the performance and increasing the integration degree of devices, to a minimum layout dimension or a dimension approximate to the minimum layout dimension and it has been found that when the unit bipolar transistor is operated at a high voltage or a high current, characteristics thereof are sometimes degraded by the effect of self-heat generation.

Further, in a case of using a plurality of unit bipolar transistors connected in parallel, it has been found that the amount of heat generation is higher for unit bipolar transistors arranged in a central portion than that for the unit bipolar transistors arranged at the periphery, and scattering of temperature at the junction for each of the unit bipolar transistors gives an effect on the scattering of device characteristic of the transistors.

Further, in a case of using a plurality of unit bipolar transistors connected in parallel, when emitter interconnections are extended in the direction of each row, it has been found that the unit bipolar transistors arranged at the portion with low emitter interconnection resistance cause thermal runaway under the effect of the self heat generation effect leading to destruction due to the difference of emitter interconnection resistance between the unit bipolar transistors arranged at a portion with low emitter interconnection resistance and unit bipolar transistors arranged at a portion with high emitter interconnection resistance, when the unit bipolar transistors are operated at a high voltage or a high current.

The present invention intends to provide a technique capable of improving the heat dissipation of an insulated device isolation type bipolar transistor.

The invention further intends to provide a technique capable of reducing capacitance relative to a substrate in a case of using a plurality of unit bipolar transistors connected in parallel.

The outline for typical inventions among those disclosed in the present application is simply described as below.

That is, the present invention has a structure in a semiconductor device in which bipolar transistors are formed in a plurality of device forming regions electrically isolated from each other by device isolation trenches traversing a semiconductor layer, wherein a device isolation trench for each of unit bipolar transistor constituting the plurality of bipolar transistors connected in parallel is removed, and the plurality of bipolar transmitters are entirely surrounded with a device isolation trench.

Further, in the invention, a distance between the emitter of the unit bipolar transistor and the device isolation trench is enlarged.

-   (1) In a first aspect, the invention provides a semiconductor device     having a plurality of bipolar transistors connected in parallel in a     plurality of device forming regions electrically isolated from each     other by device isolation trenches traversing a semiconductor layer,     in which the device isolation trenches are removed, the plurality of     bipolar transistors are entirely surrounded with one device     isolation trench, and buried collector regions for the bipolar     transistors are disposed being spaced apart from each other. -   (2) In a second aspect, the invention provides a semiconductor     device having a plurality of bipolar transistors connected in     parallel in a plurality of device forming regions electrically     isolated from each other by device isolation trenches traversing a     semiconductor layer, in which the device isolation trenches are     removed, the plurality of bipolar transistors are entirely     surrounded with one device isolation trench, and buried collector     regions for each of adjacent bipolar transistors are arranged in     contact with each other. -   (3) In a third aspect, the invention provides a semiconductor device     having a plurality of bipolar transistors connected in parallel in a     plurality of device forming regions electrically isolated from each     other by device isolation trenches traversing a semiconductor layer,     in which the device isolation trenches are removed, the plurality of     bipolar transistors are entirely surrounded with one device     isolation trench, and the buried collector region for the bipolar     transistor disposed at the outermost periphery and the device     isolation trench are disposed being spaced apart from each other. -   (4) In a fourth aspect, the invention provides a semiconductor     device having a plurality of bipolar transistors connected in     parallel in a plurality of device forming regions electrically     isolated from each other by device isolation trenches traversing a     semiconductor layer, in which the device isolation trenches are     removed, the plurality of bipolar transistors are entirely     surrounded with one device isolation trench, and the buried     collector region for the bipolar transistors disposed at the outer     most periphery and the device isolation trench are disposed being     spaced apart from each other. -   (5) In the semiconductor device as described in (1) or (4) above, it     is preferred that a depletion region with the low concentration     layer is between the buried collector region of the bipolar     transistor and the device isolation trench. -   (6) In the semiconductor device as described in (1) above, it is     preferred that the device isolation trench is disposed being spaced     apart from the emitter region of the bipolar transistor and the end     of the buried collector region of the bipolar transistor is disposed     being enlarged and spaced from the emitter region of the bipolar     transistor. -   (7) In the semiconductor device as described in (1) above, it is     preferred that the device isolation trench is disposed being remote     from the emitter region of the bipolar transistor and being     enlarged, and the buried collector region of the bipolar transistor     is spaced apart from the device isolation trench. -   (8) In the semiconductor device as described in (3), (4), or (7)     above, it is preferred that a depletion region with a low     concentration layer is formed between the buried collector region of     the bipolar transistor and the device isolation trench. -   (9) In the semiconductor device as described in (1) above, it is     preferred that bipolar transistors are arranged thinly in the     central portion and densely in the peripheral portion. -   (10) In the semiconductor device as described in (1) above, it is     preferred that the emitter interconnection is extended in the     direction of each row (or column), and the number of the bipolar     transistors in the direction of each row (column) is made less than     the number of the bipolar transistors in the direction of the column     (or row).

Typical effects of the invention obtained by the means described above are that the heat dissipation of the bipolar transistors formed in the device forming regions isolated from each other by the device isolation trenches can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a symbol chart for a transistor constituting a semiconductor device as an embodiment according to the present invention;

FIG. 1B is a circuit diagram in a case of connecting the transistors in FIG. 1A in parallel;

FIG. 2A is a plan view of a unit transistor of the existent structure shown in FIG. 1;

FIG. 2B is a cross sectional view taken along line X1-X1 in FIG. 1A in a case where the unit transistor is an npn type□

FIG. 3A is a plan view of a unit transistor of a multi-emitter type of the existent structure shown in FIG. 1;

FIG. 3B is a cross sectional view taken along line X1-X1 in FIG. 1A in a case where the unit transistor is an npn type□

FIG. 4A is a plan view of a unit transistor as an embodiment of the invention;

FIG. 4B is a cross sectional view along line X1-X1 in FIG. 4A in a case where the unit transistor is an npn type;

FIG. 5 shows a result of confirming the effect of the embodiment shown in FIG. 4 by electrical characteristics in which

FIG. 5A shows the dependence of the thermal resistance Rth of the unit transistor on the device isolation trench area;

FIG. 5B shows the dependence of a device destruction power by the self heat generation of the unit transistor on the device isolation trench area;

FIG. 5C shows the dependence of a current gain cut-off frequency f_(T) on the device isolation trench area;

FIG. 5D shows the dependence of a collector current (IC@f_(Tpeak)) at the maximum current gain cut-off frequency f_(Tpeak) on the device isolation trench area;

FIG. 6 is a cross sectional view taken along line X1-X1 of other embodiment shown in FIG. 4A;

FIG. 7 is a cross sectional view taken along line X1-X1 of as a embodiment shown in FIG. 4A;

FIG. 8A is a plan view in a case of connecting in parallel a plurality of unit transistors of the existent structure shown in FIG. 1;

FIG. 8B is a cross sectional view taken along line X1-X1 in FIG. 8A in a case where the unit transistor is an npn type;

FIG. 9 shows an embodiment of the invention in which a plurality of unit transistors are connected in parallel; in which

FIG. 9A is a plan view in which individual device isolation trenches for a plurality of unit transistors connected in parallel of the existent structure shown in FIG. 1 are removed and the unit transistors connected in parallel are entirely surrounded with one device isolation trench;

FIG. 9B is a cross sectional view taken along line X1-X1 in FIG. 9A in a case where the unit transistor is an npn type;

FIG. 10 is a cross sectional view taken along line X1-X1 of other embodiment of FIG. 9A;

FIG. 11 is a cross sectional view taken along line X1-X1 of other embodiment of FIG. 9A;

FIG. 12 shows a result of confirming the effect of the embodiment shown in FIG. 10 by electrical characteristics, in which

FIG. 12A shows IC-VCB characteristics in a case where the existent unit transistor Qu as shown in FIG. 8A has a device isolation trench 2 b individually;

FIG. 12B shows IC-VCB characteristics in a case of inserting a ballast resistance to the emitter terminal for each of the unit transistors in a structure where the existent unit transistor Qu as shown in FIG. 8A has a device isolation trench 2 b individually;

FIG. 12C shows IC-VCB characteristics in a case of inserting a ballast resistance to the emitter terminal of each unit transistor Qu and, further, applying the embodiment shown in FIG. 10;

FIG. 13A is a plan view of the unit transistor in shown FIG. 1, and FIGS. 13B to 13D are plan views for the unit transistor as an embodiment of the invention;

FIG. 14A is a plan view in a case of connecting in parallel a plurality of unit transistors shown in FIG. 1;

FIG. 14B and FIG. 14C are plan views in which a plurality of unit transistors as one embodiment of the invention are entirely surrounded with a device isolation trench;

FIG. 15A is a plan view in a case of connecting in parallel a plurality of unit transistors shown in FIG. 1;

FIG. 15B and FIG. 15C are plan views in which a plurality of unit transistors as an embodiment of the invention are entirely surrounded with one device isolation trench;

FIG. 16A and FIG. 16B are plan views in which a plurality of unit transistors connected in parallel as an embodiment according to the invention are entirely surrounded with one device isolation trench, and the unit transistors are arranged densely in the peripheral portion and thinly in the central portion;

FIG. 17A is a plan view in which a plurality of unit transistors connected in parallel as an embodiment of the invention are entirely surrounded with one device isolation trench, emitter interconnection is extended in the direction of each of the columns, and the unit transistors in the direction of each column are disposed by the number more than that of the unit bipolar transistors in the direction of each row;

FIG. 17B is a plan view in which a plurality of unit transistors connected in parallel as an embodiment of the invention are entirely surrounded with one device isolation trench, emitter interconnection is extended in the direction of each of the columns, and the unit transistors in the direction of each column are disposed by the number less than that of the unit bipolar transistors in the direction of each row;

FIG. 18A is a circuit diagram in the case where a plurality of unit transistors whose emitter-base are connected by interconnections shown in FIG. 1A are connected in parallel with each other; and

FIG. 18B is a plan view in a case of removing individual device isolation trenches for the unit transistors shown in the circuit diagram and the unit transistors connected in parallel entirely with one device isolation trench.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention is to be described specifically by way of examples with reference to the drawings. In this embodiment, the bipolar transistor is simply referred to as a transistor.

Embodiment 1

FIG. 1A shows a unit transistor Qu constituting a semiconductor device applied with the present invention.

In FIG. 1B, a transistor Q is formed by connecting a plurality of the unit transistors shown in FIG. 1A in parallel.

FIG. 2 shows an example of a device structure for a unit transistor Qu in the prior art shown in FIG. 1. FIG. 2A shows a plan view of the unit transistor Qu, and FIG. 2B shows a cross sectional view taken along line X1-X1 in FIG. 2A in a case where the unit transistor Qu is an npn type. While the example of the device structure is an insulated device isolation type transistor using an SOI substrate, the invention is applicable also to an insulated device isolation type transistor using a BULK substrate. Further, the conduction type of the transistor may be either an npn type or a pnp type. Further, the structure of the transistor may be a lateral, longitudinal, or hetero structure with no particular restriction.

In FIGS. 2A and 2B, and subsequent figures, it is noted that numeral 1 identifies an SOI substrate comprised of a lower substrate layer 1 a, and insulative layer 1 b and a semiconductor device forming area 1 c. In addition, areas forming the collector, base and emitter of the devices, the device forming area includes insulative layers 2 a and 2 b. In particular, the area 2 b is a device isolation trench. As illustrated in FIGS. 2A and 2B, and subsequent figures, for example, the emitter, base and collector regions are formed with an emitter region 6, a base region 4 and collector regions 3 a, 3 b and 3 c. A base contact BC is formed with a base electrode 9B contacting a contact layer 5 which connects the electrode 9 b with the base region 4. A collector contact region CC is formed with the electrode 9C coming into contact with the collector region 3 b. The emitter contact EC is formed with the emitter electrode 9E and the underlying emitter contact area 7.

FIG. 3 shows an example of a device structure in which the unit transistor Qu in the prior art shown in FIG. 1 is a multi emitter type. FIG. 3A is a plan view for the unit transistor Qu, FIG. 3B shows a cross sectional view taken along line X1-X1 in FIG. 3A in a case where the unit transistor Q is an npn type. The size between two emitters EC1-EC2 and the size between emitter-device isolation trenches 2 b is designed as a minimum layout size in the process, or a size approximate to the minimum layout size in order to enhance the performance and increasing the integration degree of the device.

Since the unit transistor Qu is surrounded with a device isolation trench 2 b of high heat resistance for electrical isolation from adjacent devices, structure has poor heat dissipation and high thermal resistance.

FIG. 4 shows an example for the unit transistor. The unit transistor may also be in a multi-emitter structure as shown in FIG. 3. FIG. 4A and FIG. 4B show an example in a case of disposing the device isolation trench 2 b of the unit transistor Qu and the end of the buried collector region 3 a shown in FIG. 2 being extended and spaced from the emitter EC. Since the heat generation in the transistor Qu is shielded by the device isolation trench 2 b of high thermal resistance, the thermal resistance Rth of the unit transistor Qu depends on the inside area of the device isolation trench 2 b. Accordingly, by extending the device isolation trench 2 b, it is possible to obtain a structure capable of decreasing the thermal resistance of the unit transistor Qu by extending the device isolation trench 2 b.

FIG. 5 shows a result of measurement for the unit transistor in a case of applying the example in FIG. 4. What is shown by device isolation trench standard’ in the graph is the transistor characteristics of the existent structure shown in FIG. 2 and other data are data for the unit transistor in a case of applying the example in FIG. 4.

FIG. 5A shows the dependence of the thermal resistance Rth of the unit transistor on the device isolation trench area (area insides the device isolation trench 2 b). Rth lowers alone with enlargement of the device isolation trench 2 b and the heat dissipation is improved.

FIG. 5B shows the dependence of the device destruction power by the self heat generation of the unit transistor on the device isolation trench area. It is possible to increase the power that causes destruction of the device by the lowering of the thermal resistance of the unit transistor by the enlargement of the device isolation trench 2 b. In the example, device destruction was not observed when the trench was enlarged by 8 μm each in the direction of the row and direction of the column relative to the device isolation trench 2 b of the unit transistor of the existent structure shown in FIG. 2.

FIG. 5C shows the dependence of the current gain cut-off frequency f_(T) on the device isolation trench area. Along with the enlargement of the device isolation trench 2 b, the current gain cut-off frequency f_(T) at high VCE is also improved.

FIG. 5D shows the dependence of the collector current (IC@f_(Tpeak)) upon maximum current gain cut-off frequency (f_(Tpeak)) on the device isolation trench area. It was confirmed that IC@f_(Tpeak) was also improved along with enlargement of the device isolation trench 2 b.

FIG. 6 shows other example in the unit transistor shown in FIG. 4. This is a structure in which the buried collector region 3 a is formed only in the identical region before enlargement of the device isolation trench 2 b. Compared with FIG. 4A, since the area of the buried collector region 3 a is smaller, the bottom component of the capacitance relative to the substrate can be decreased.

FIG. 7 shows other example in the unit transistor shown in FIG. 6. This is a structure in which a depletion region with a low concentration layer 10 is formed between the buried collector region 3 and the device isolation trench 3 a. In the structure shown in FIG. 4B, the peripheral component of the capacitance relative to the substrate is determined only with the capacitance of the device isolation trench 2 b, whereas this is determined by a serial capacitance of the capacitance of the device isolation trench 2 b and the capacitance of the depletion region with the low concentration layer 10 in the structure of FIG. 7. Further, also for the bottom component of the capacitance relative to the substrate, it is determined by a serial capacitance of the capacitance for the depletion region with the low concentration layer 10 and the capacitance for the insulative layer 1 b of the SOI substrate 1 at the end of the buried collector region 3 a. Accordingly, this is a structure capable of further decreasing the capacitance relative to the substrate compared with the structure of FIG. 6.

Embodiment 2

FIG. 8 shows an example of a device structure in a case of connecting in parallel a plurality of the unit transistors Qu in the prior art. FIG. 8A is a plan view in a case of connecting in parallel a plurality of the unit transistors Qu and FIG. 8B is a cross sectional view taken alone line X1-X1 in FIG. 8A in a case where the unit transistor Qu is an npn type.

FIG. 9 shows an example in a case of connecting in parallel a plurality of the unit transistors Qu in parallel. The unit transistor may also be a multi-emitter structure as shown in FIG. 3. FIG. 9A and FIG. 9B show an example of removing the device isolation trench 2 b for each of the unit transistors Qu and entirely surrounding the plurality of unit transistors Qu connected in parallel with one device isolation trench 2 b.

While the cross sectional structure is similar with that of the multi-emitter type unit transistor Qu shown in FIG. 3, the unit transistor Qu in FIG. 3 for enhancing the performance and increasing the integration degree of the device, is designed to a minimum layout size or a size approximate to the minimum layout size in the process. On the other hand, the example of FIG. 9 has a structure in which the size between emitters (EC1, EC2, EC3) of each of the unit transistors Qu, and the size between the emitter of the unit transistor Qu disposed to the outer most periphery and the device isolation trench 2 b is much wider in order to improve the heat dissipation.

In this embodiment, since the inter-emitter distance between adjacent unit transistors Qu is spaced apart further and the distance between the emitter of the unit transistor Qu deposed to the outermost periphery and the device isolation trench is enlarged, this provides a structure capable of lowering the thermal resistance Rth of the unit transistor Qu compared with the existent structure shown in FIG. 8. Further, since the plurality of unit transistors Qu are surrounded with one device isolation trench 2 b, this provides a structure capable of decreasing the scattering of the thermal resistance Rth between each of the unit transistors Qu. Further, since the device isolation trench 2 b disposed to each of the unit transistors Qu individually is removed, the peripheral component of the capacitance relative to the substrate which was determined by the device isolation trench 2 b between adjacent unit transistors Qu is eliminated, so that the capacitance relative to the substrate can be decreased compared with that in FIG. 8.

FIG. 10 shows other embodiment in a case of connecting in parallel a plurality of unit transistors Qu shown in FIG. 9. This is a structure in which the buried collector region 3 a is buried over the entire inside of the device isolation trench 2 b. Since the buried collector regions 3 a of the respective unit transistors Qu are in contact with each other, this provides a structure capable of decreasing the scattering of the thermal resistance Rth between each of the unit transistors Qu. Like the structure shown in FIG. 9, the peripheral component of the capacitance relative to the substrate can be decreased and, in this embodiment, the capacitance relative to the substrate for the entire transistors connected in parallel in plurality was decreased by about 25% compared with that of the existent structure shown in FIG. 8.

FIG. 11 shows other embodiment in a case of connecting in parallel a plurality of unit transistors Qu shown in FIG. 9. This is a structure in which a depletion region with a low concentration layer 10 is formed between the buried collector regions 3 a of each of the unit transistors Qu and between the buried collector region 3 a of the unit transistor Qu arranged at the outer most circumference and the device isolation trench 2 b.

Since the peripheral component of the capacitance of each unit transistor Qu relative to the substrate is determined by the serial capacitance of the capacitance for the depletion region with the low concentration layer 10 and the capacitance for the insulated layer 1 b of the SOI substrate 1, this provides a structure capable of further decreasing the capacitance relative to the substrate compared with that in FIG. 9 and FIG. 10.

FIGS. 12A to 12C show the result for measurement of IC-VCB characteristics in a case of connecting in parallel a plurality of base-ground unit transistors Qu used at 2 mA emitter. The transistors are arranged by the number of five in the direction of the column and by the number of eight in the direction of row, and the unit transistors Q are connected in parallel by the number of 40 in total. FIG. 12A shows the IC-VCB characteristics in a case where the existent unit transistor Qu as shown in FIG. 8A has the device isolation trench 2 b individually. By the scattering of the parasitic resistance for the emitter interconnection of each of the unit transistors Qu, in the unit transistors Qu arranged to a portion of the emitter interconnection with a lower parasitic resistance, the characteristics are far from reaching the aimed performance: IC=40 mA (@VCB=14 V) due to the thermal runaway under the effect of the self heat generation effect. FIG. 12B shows an IC-VCB characteristic in a structure in which each of the existent unit transistors Qu as shown in FIG. 8B individually has a device isolation trench 2 b in a case where a ballast resistor is inserted to the emitter terminal of each unit transistor Qu used generally for decreasing the scattering of the base-emitter voltage VBE of the each unit transistor Qu. While the device breakdown voltage caused by the thermal runaway is improved remarkably compared with the characteristic shown in FIG. 12A, the aimed performance can not be attained because of the thermal runaway caused by the self-heat generation effect of specified unit transistors Qu by the scattering of the thermal resistance Rth between each of the unit transistors Qu. FIG. 12C shows the IC-VCB characteristic in a case of inserting the ballast resistor to the emitter terminal for each of the unit transistors Qu and, further, applying the embodiment shown in FIG. 10. This is an embodiment of attaining the aimed performance by decreasing the scattering of the thermal resistance between each of the unit transistors due to the structure in which the transistors connected in parallel are entirely surrounded with one device isolation trench 2 b.

Embodiment 3

FIGS. 13A to 13D are plan views showing other embodiment regarding the method of extending the device isolation trench 2 b in the unit transistor Qu.

FIG. 13A is a plan view of an existent structure.

FIG. 13B, FIG. 13C, and FIG. 13D show embodiments of extending the device isolation trench 2 b. The method of extending the device isolation trench 2 b may be applied either only in the direction of row only in the direction of column or further, a combination thereof. Further, the size can be designed to the necessary minimum in view of FIG. 5.

Embodiment 4

FIGS. 14A to 14C are plan views showing embodiments in a case of connecting a plurality of unit transistors Qu in parallel only in one direction. It is assumed here that each of the unit transistors Qu is connected in parallel by means of interconnections.

FIG. 14A is a plan view of an existent structure in which each of the unit transistors Qu has a device isolation trench 2 b.

FIG. 14B and FIG. 14C show embodiments of removing the device isolation trench 2 b for each of the unit transistors Qu and surrounding a plurality of unit transistors Qu connected in parallel entirely with one device isolation trench 2 b.

Embodiment 5

FIGS. 15A to 15C are plan views showing an embodiment in a case of connecting in parallel a plurality of unit transistors Qu in the direction of row and in the direction of column. Each of the unit transistors Qu is connected in parallel by interconnections.

FIG. 15A is a plan view of an existent structure in which each of the unit transistors Qu has a device isolation trench 2 b.

FIG. 15B and FIG. 15C show embodiments in a case of removing the device isolation trench 2 b for each of the unit transistors Qu and surrounding the plurality of unit transistors Qu connected in parallel entirely with one device isolation trench 2 b.

Embodiment 6

FIGS. 16A and 16B are plan views showing other embodiment in a case of connecting a plurality of unit transistors Qu in parallel in the direction of row and in the direction of column. It is assumed here that each of the unit transistors Qu is connected in parallel by interconnections.

As a result of thermal analysis, it has been found that the amount of heat generation of the unit transistors Qu situated in the central portion is higher compared with that in the peripheral portion.

FIG. 16A and FIG. 16B show embodiments of removing the device isolation trench 2 b from each of the first unit transistors Qu and surrounding the plurality of unit transistors Qu connected in parallel entirely with one device isolation trench 2 b and, further, arranging each of the unit transistors Qu densely in the peripheral portion and thinly in the central portion. With arrangement described above, the scattering of the thermal resistance between each of the unit transistors Qu can be decreased.

Embodiment 7

FIGS. 17A and 17B are plan views showing a further embodiment in a case of connecting a plurality of unit transistors Qu in parallel in the direction of row and in the direction of column. In this embodiment, emitter interconnections L3 are extended in the direction of each column. In a case of extending the emitter interconnection L3 in the direction of each column, as shown in FIG. 17B, it is preferred to adopt a structure in which the unit transistors in the direction of each column are disposed by the number less than the number of the unit transistors dispatch in the direction of each row. Further, the interconnection length from an emitter voltage supply portion to the emitter electrode for each of the unit transistors is formed as an equivalent length interconnection.

Due to the arrangement and interconnection structure of the unit transistors Qu as shown in FIG. 17B, the scattering for the emitter-base voltage VBE due to the parasitic resistance of the emitter interconnection can be decreased and this is a structure capable of preventing the device destruction due to the thermal runaway under the effect of the self heat generation effect of the unit transistors Qu disposed at a portion with low parasitic resistance of the emitter interconnection.

Embodiment 8

FIGS. 18A and 18B show a further embodiment in a case of connecting in parallel a plurality of unit transistors Qu shown in FIG. 9. This is an embodiment of connecting the emitters and the bases of the unit transistors shown in FIG. 9 by way of an interconnection L3, and using them as diodes. FIG. 18A is a circuit diagram for connecting a plurality of unit transistors Qu in parallel in which the emitters and the bases are connected by means of an interconnection and FIG. 18B is a plan view. The scattering of the thermal resistance between each of the unit transistors connected in parallel can be decreased in the same manner as in the embodiment of FIG. 9, and the capacitance relative to the substrate can also be decreased. 

1. A semiconductor device having a plurality of bipolar transistors connected in parallel and integrated on a substrate, comprising: a semiconductor layer which is formed at a major surface of said substrate; an isolation trench traversing the semiconductor layer and entirely surrounding the semiconductor layer; a plurality of device forming regions arranged in said semiconductor layer so as to be closely spaced from each other without forming device isolation trenches between the device forming regions, wherein each of said device forming regions is formed with a buried collector region buried underneath said semiconductor layer so as to configure the bipolar transistor, wherein said buried collector regions are disposed so as to be spaced apart by at least 8 μm from said isolation trench.
 2. A semiconductor device according to claim 1, wherein a depletion region with a low concentration layer is formed between the buried collector region of the bipolar transistor and the device isolation trench.
 3. A semiconductor device configured by a plurality of bipolar transistors connected in parallel, comprising: a substrate having a major surface; a semiconductor layer formed at the major surface of said substrate; an isolation trench traversing the semiconductor layer and entirely surrounding the semiconductor layer at said major surface; a plurality of device forming regions located in said semiconductor layer so as to be closely spaced apart from each other through portions of said semiconductor layer without forming device isolation trenches between the device forming regions; buried collector regions buried in said device forming regions underneath said semiconductor layer, respectively, so that each of said device forming regions is formed with a base region and an emitter region to configure a bipolar transistor including the corresponding buried collector region; and connection means electrically connecting said buried collector regions in common, said base regions in common, and said emitter regions in common, respectively, wherein said isolation trench is arranged to be spaced apart by at least 8 μm from said plurality of device forming regions.
 4. A semiconductor device according to claim 1, wherein a depletion region with a low concentration layer is formed between each of the buried collector regions for the bipolar transistors.
 5. A semiconductor device according to claim 1, wherein a depletion region with a low concentration layer is formed between the buried collector region of the bipolar transistor and the device isolation trench.
 6. A semiconductor device according to claim 1, wherein bipolar transistors are arranged thinly in the central portion and densely in the peripheral portion within the semiconductor layer surrounded by said isolation trench.
 7. A semiconductor device according to claim 1, wherein the emitter connection is extended in the direction of each row (or column), and the number of the bipolar transistors in the direction of each row (or column) is made less than the number of the bipolar transistors in the direction of the column (or row).
 8. A Semiconductor device configured by a plurality of bipolar transistors connected in parallel, comprising: a substrate having a major surface; a semiconductor layer formed at the major surface of said substrate; an isolation trench traversing the semiconductor layer and entirely surrounding the semiconductor layer at said major surface; a plurality of device forming regions located in said semiconductor layer so as to be closely spaced from each other through portions of said semiconductor layer without forming device isolation trenches between the device forming regions; buried collector regions buried in said device forming regions underneath said semiconductor layer, respectively, so that each of said device forming regions is formed with a base region and an emitter region to configure a bipolar transistor including the corresponding buried collector region; and connection means electrically connecting said buried collector regions in common, said base regions in common, and said emitter regions in common, respectively, wherein said buried collector regions are arranged in contact with each other, and wherein said isolation trench is arranged to be spaced apart by at least 8 μm from said plurality of device forming regions. 